Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga*, J. Verd, F. Torres, J. Teva, J. L. López, G. Abadal, J. Esteve, F. Pérez-Murano, N. Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)

Abstract

The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.

Original languageEnglish
Pages (from-to)1374-1378
Number of pages5
JournalMicroelectronic Engineering
Volume84
Issue number5-8
DOIs
Publication statusPublished - May 2007

Keywords

  • Cantilever-based-sensors
  • CMOS-MEMS
  • Resonant cantilever

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