Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga; J. Verd; F. Torres; J. Teva; J. L. López; G. Abadal; J. Esteve; F. Pérez-Murano; N. Barniol

doi:https://doi.org/10.1016/j.mee.2007.01.114

Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga, J. Verd, F. Torres, J. Teva, J. L. López, G. Abadal, J. Esteve, F. Pérez-Murano, N. Barniol

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research › peer-review

6 Citations (Scopus)

Abstract

The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations. © 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1374-1378
Journal	Microelectronic Engineering
Volume	84
DOIs	https://doi.org/10.1016/j.mee.2007.01.114
Publication status	Published - 1 May 2007

Keywords

CMOS-MEMS
Cantilever-based-sensors
Resonant cantilever

Access to Document

https://doi.org/10.1016/j.mee.2007.01.114

Fingerprint Dive into the research topics of 'Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever'. Together they form a unique fingerprint.

Cite this

@article{4e10f8b30ddb40538ac96b8b1d2da5a1,

title = "Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever",

abstract = "The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations. {\textcopyright} 2007 Elsevier B.V. All rights reserved.",

keywords = "CMOS-MEMS, Cantilever-based-sensors, Resonant cantilever",

author = "A. Uranga and J. Verd and F. Torres and J. Teva and L{\'o}pez, {J. L.} and G. Abadal and J. Esteve and F. P{\'e}rez-Murano and N. Barniol",

year = "2007",

month = may,

day = "1",

doi = "https://doi.org/10.1016/j.mee.2007.01.114",

language = "English",

volume = "84",

pages = "1374--1378",

}

TY - JOUR

T1 - Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

AU - Uranga, A.

AU - Verd, J.

AU - Torres, F.

AU - Teva, J.

AU - López, J. L.

AU - Abadal, G.

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2007/5/1

Y1 - 2007/5/1

N2 - The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations. © 2007 Elsevier B.V. All rights reserved.

AB - The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations. © 2007 Elsevier B.V. All rights reserved.

KW - CMOS-MEMS

KW - Cantilever-based-sensors

KW - Resonant cantilever

U2 - https://doi.org/10.1016/j.mee.2007.01.114

DO - https://doi.org/10.1016/j.mee.2007.01.114

M3 - Article

VL - 84

SP - 1374

EP - 1378

ER -