Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga, J. Verd, F. Torres, J. Teva, J. L. López, G. Abadal, J. Esteve, F. Pérez-Murano, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)


The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations. © 2007 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1374-1378
JournalMicroelectronic Engineering
Publication statusPublished - 1 May 2007


  • Cantilever-based-sensors
  • Resonant cantilever

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