Electrical characterization of multiple leakage current paths in HfO2/Al2O3-based nanolaminates

A. Rodriguez, M.B. Gonzalez, F. Campabadal, J. Suñe, E. Miranda

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)-
JournalMicroelectronics Reliability
Publication statusPublished - 1 Jan 2015

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