Original language | English |
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Pages (from-to) | 181-184 |
Journal | Sens. actuators, A, Phys. |
Volume | 67 |
Issue number | 1-3 |
Publication status | Published - 1 Jan 1998 |
Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding
J.A. Plaza, J. Esteve, E. Lora-Tamayo
Research output: Contribution to journal › Article › Research
25
Citations
(Scopus)