Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding

J.A. Plaza, J. Esteve, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearch

    25 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)181-184
    JournalSens. actuators, A, Phys.
    Volume67
    Issue number1-3
    Publication statusPublished - 1 Jan 1998

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