Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding

J.A. Plaza, J. Esteve, E. Lora-Tamayo

Research output: Contribution to journal › Article › Research

Cite this

@article{1604925fa3d94fcb8eb5b70be233dbac,

title = "Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding",

author = "J.A. Plaza and J. Esteve and E. Lora-Tamayo",

year = "1998",

month = jan,

day = "1",

language = "English",

volume = "67",

pages = "181--184",

number = "1-3",

}