Original language | English |
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Title of host publication | Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS |
Place of Publication | No informada (US) |
Pages | 266-271 |
Number of pages | 5 |
Volume | 4019 |
Edition | 1 |
Publication status | Published - 1 Jan 2000 |
Dynamic checking improves MEMS desgn methodology
X. Marín, J. Carrabina, J. Bausells
Research output: Chapter in Book › Chapter › Research