Dielectric BD in polycristalline HfO2 gate dielectrics investigated by CAFM',

V. Iglesias, M. Porti, M. Nafria, X. Aymerich, P. Dudek, G. Bersuker

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	-
Journal	Journal of Vacuum Science & Technology B
Volume	29
Issue number	01AB02
Publication status	Published - 1 Jan 2011

Cite this

@article{55274bffb8fe4d45bd4114b87d5bdf7e,

title = "Dielectric BD in polycristalline HfO2 gate dielectrics investigated by CAFM',",

author = "V. Iglesias and M. Porti and M. Nafria and X. Aymerich and P. Dudek and G. Bersuker",

year = "2011",

month = jan,

day = "1",

language = "English",

volume = "29",

pages = "--",

number = "01AB02",

}