Dielectric BD in polycristalline HfO2 gate dielectrics investigated by CAFM',

V. Iglesias, M. Porti, M. Nafria, X. Aymerich, P. Dudek, G. Bersuker

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)-
JournalJournal of Vacuum Science & Technology B
Volume29
Issue number01AB02
Publication statusPublished - 1 Jan 2011

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