Dielectric BD in polycristalline HfO2 gate dielectrics investigated by CAFM

Francisco Javier Aymerich Humet, Marc Porti Pujal

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)01AB02-
JournalJournal of Vacuum Science & Technology B
Volume29
Issue number1
Publication statusPublished - 1 Jan 2011

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