Detection of gases with arrays of micromachined tin oxide gas sensors

C. Cané, I. Gràcia, A. Götz, L. Fonseca, E. Lora-Tamayo, M. C. Horrillo, I. Sayago, J. I. Robla, J. Rodrigo, J. Gutiérrez

    Research output: Contribution to journalArticleResearchpeer-review

    33 Citations (Scopus)

    Abstract

    A good detection of NO2, CO and toluene at low concentrations has been carried out by using a micromachined gas sensor array composed of three devices working at different temperatures. The structure is fabricated using standard microelectronic technologies and tin oxide layers as sensitive material. The total power consumption of the array is in the range of 150 mW and a good uniformity of temperature is achieved, thanks to a silicon plug placed under the active area of each sensor. With this device type, it is possible to discriminate gases in a mixture when each array microsensor is heated at a proper temperature.
    Original languageEnglish
    Pages (from-to)244-246
    JournalSensors and Actuators, B: Chemical
    Volume65
    Issue number1
    DOIs
    Publication statusPublished - 30 Jun 2000

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