Design of a Modular Micropump Based on Anodic Bonding

Jaume Esteve Tinto, M.C. Acero, J.A. Plaza, M. Carmona, S. Marco, J. Samitier

    Research output: Contribution to journal › Article › Research

    39 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)179-182
    JournalJournal of Micromechanics and Microengineering
    Volume7
    Issue number3
    Publication statusPublished - 1 Sep 1997

    Cite this

    Esteve Tinto, J., Acero, M. C., Plaza, J. A., Carmona, M., Marco, S., & Samitier, J. (1997). Design of a Modular Micropump Based on Anodic Bonding. Journal of Micromechanics and Microengineering, 7(3), 179-182.