Design of a Modular Micropump Based on Anodic Bonding

Jaume Esteve Tinto, M.C. Acero, J.A. Plaza, M. Carmona, S. Marco, J. Samitier

    Research output: Contribution to journalArticleResearch

    39 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)179-182
    JournalJournal of Micromechanics and Microengineering
    Volume7
    Issue number3
    Publication statusPublished - 1 Sep 1997

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