Original language | English |
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Pages (from-to) | 179-182 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 7 |
Issue number | 3 |
Publication status | Published - 1 Sep 1997 |
Design of a Modular Micropump Based on Anodic Bonding
Jaume Esteve Tinto, M.C. Acero, J.A. Plaza, M. Carmona, S. Marco, J. Samitier
Research output: Contribution to journal › Article › Research
39
Citations
(Scopus)