Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

Jaume Verd, Gabriel Abadal, J. Teva, María Villarroya Gaudó, Arantxa Uranga, Xavier Borrisé, Francesca Campabadal, Jaume Esteve, Eduardo Figueras Costa, Francesc Pérez-Murano, Zachary J. Davis, Esko Forsén, Anja Boisen, Nuria Barniol

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67 Citations (Scopus)

Abstract

In this paper, we report on the main aspects of the design, fabrication, and performance of a microelectromechanical system constituted by a mechanical submicrometer scale resonator (cantilever) and the readout circuitry used for monitoring its oscillation through the detection of the capacitive current. The CMOS circuitry is monolithically integrated with the mechanical resonator by a technology that allows the combination of standard CMOS processes and novel nanofabrication methods. The integrated system constitutes an example of a submicroelectromechanical system to be used as a cantilever-based mass sensor with both a high sensitivity and a high spatial resolution (on the order of 10-18 g and 300 nm, respectively). Experimental results on the electrical characterization of the resonance curve of the cantilever through the integrated CMOS readout circuit are shown. © 2005 IEEE.
Original languageEnglish
Pages (from-to)508-519
JournalJournal of Microelectromechanical Systems
Volume14
DOIs
Publication statusPublished - 1 Jun 2005

Keywords

  • CMOS analog integrated circuits
  • Capacitive transducers
  • Microelectromechanical devices
  • Nanotechnology

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