Design & development of semiconductor MOEMS and the requirement of international standardization with a focus on Architecture and design of Microsystems

    Research output: Chapter in BookChapterResearch

    Original languageEnglish
    Title of host publicationProceedings of the International Seminar MEMSTAND: Standardisation for Microsystems the Way Forward
    Place of PublicationTeddington (GB)
    Pages118-129
    Number of pages11
    Edition1
    Publication statusPublished - 1 Jan 2003

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