Damage Reduction in Channeled Ion Implanted 6H-SiC

E. Morvan, N. Mestres, F.J. Campos, J. Pascual, A. Hállen, M. Linnarsson, A.Y. Kutznetsov

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)893-896
JournalMat. sci. forum
Volume338
Issue number3
Publication statusPublished - 1 Jan 2000

Cite this

Morvan, E., Mestres, N., Campos, F. J., Pascual, J., Hállen, A., Linnarsson, M., & Kutznetsov, A. Y. (2000). Damage Reduction in Channeled Ion Implanted 6H-SiC. Mat. sci. forum, 338(3), 893-896.