Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection

E. Marigó, J.L. Muñoz-Gamarra, G. Vidal, J. Giner, F. Torres, A. Uranga, N. Barniol

Research output: Contribution to journalArticleResearch

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)2325- 2329
JournalMicroelectronic Engineering
Volume88
Issue number8
DOIs
Publication statusPublished - 1 Jan 2011

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