Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	2325- 2329
Journal	Microelectronic Engineering
Volume	88
Issue number	8
DOIs	https://doi.org/10.1016/j.mee.2011.02.100
Publication status	Published - 1 Jan 2011

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@article{50c8de337abc4369b74116d724fcff73,

title = "Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection",

author = "E. Marig{\'o} and J.L. Mu{\~n}oz-Gamarra and G. Vidal and J. Giner and F. Torres and A. Uranga and N. Barniol",

year = "2011",

month = jan,

day = "1",

doi = "10.1016/j.mee.2011.02.100",

language = "English",

volume = "88",

pages = "2325-- 2329",

journal = "Microelectronic Engineering",

issn = "0167-9317",

number = "8",

}

TY - JOUR

T1 - Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection

AU - Marigó, E.

AU - Muñoz-Gamarra, J.L.

AU - Vidal, G.

AU - Giner, J.

AU - Torres, F.

AU - Uranga, A.

AU - Barniol, N.

PY - 2011/1/1

Y1 - 2011/1/1

U2 - 10.1016/j.mee.2011.02.100

DO - 10.1016/j.mee.2011.02.100

M3 - Article

VL - 88

SP - 2325

EP - 2329

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 8

ER -