Original language | English |
---|---|
Pages (from-to) | 2325- 2329 |
Journal | Microelectronic Engineering |
Volume | 88 |
Issue number | 8 |
DOIs | |
Publication status | Published - 1 Jan 2011 |
Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection
E. Marigó, J.L. Muñoz-Gamarra, G. Vidal, J. Giner, F. Torres, A. Uranga, N. Barniol
Research output: Contribution to journal › Article › Research
5
Citations
(Scopus)