Critical reliability challenges in scaling SiO2-based dielectric to its limit

E. Wu, J. Suñé, W. Lai, A. Vayshenker, E. Nowak, D. Harmon

    Research output: Contribution to journalArticleResearch

    23 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1175-1184
    JournalMicroelectronics and Reliability
    Volume43
    DOIs
    Publication statusPublished - 1 Jan 2003

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