Crecimiento de películas delgadas de membranas de conducción iónica medlante la técnica PIMOCVD

In this work, we describe the preparation of YSZ layers on porous and non-porous substrates using the Pulsed Injection MOCVD technique for solid electrolyte applications. In this technique, the vapour phase is obtained by injecting micro-droplets of the desired solution delivered from a container kept at room temperature into a heated evaporator connected to a deposition chamber. The droplet characteristics, volume, precursor concentration and injection frequency will control and determine the thickness and the microstructure of the layers. The system offers a high degree of repeatability of the liquid volume injected and thus a high reproducibility of the layers from low to high growth rates. This process has been optimised in order to obtain dense YSZ membranes to be used as solid electrolytes in SOFC, oxygen generators and oxygen sensors. Future work will consist in the preparation of anode-electrolyte-cathode multilayered devices. For this purpose, experimental parameters have been studied and optimised in order to obtain thin YSZ membranes on dense and porous substrates.