Correlation methods in polychromatic objects recoginition. Application fo lithographic filters

M.J. Yzuel, I. Moreno, M. Corbalán, E. Ahouzi, M.S. Millán, F. Turon, C. Gorecki, J. Campos

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)200-210
JournalProc. SPIE
Volume2363
Publication statusPublished - 1 Jan 1994

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