Confocal Raman Microprobe of Lattice Damage in N+ Implanted 6H-SiC

N. Mestres, F. Alsina, F.J. Campos, J. Pascual, E. Morvan, P. Godignon, J. Millán

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)663-666
JournalMat. sci. forum
Volume338
Issue number3
Publication statusPublished - 1 Jan 2000

Cite this

Mestres, N., Alsina, F., Campos, F. J., Pascual, J., Morvan, E., Godignon, P., & Millán, J. (2000). Confocal Raman Microprobe of Lattice Damage in N+ Implanted 6H-SiC. Mat. sci. forum, 338(3), 663-666.