Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

F.J. Campos; N. Mestres; F. Alsina; J. Pascual; E. Morvan; P. Godignon; J. Millán

doi:10.1016/S0925-9635(98)00275-1

Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

F.J. Campos, N. Mestres, F. Alsina, J. Pascual, E. Morvan, P. Godignon, J. Millán

Department of Physics

Research output: Contribution to journal › Article › Research › peer-review

5 Citations (Scopus)

Original language	English
Pages (from-to)	357-360
Journal	Diamond and Related Materials
Volume	8
Issue number	2-5
DOIs	https://doi.org/10.1016/S0925-9635(98)00275-1
Publication status	Published - 1 Mar 1999

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10.1016/S0925-9635(98)00275-1

Cite this

@article{74fc6d0ce9f84b8e8b7073e636f383eb,

title = "Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC",

author = "F.J. Campos and N. Mestres and F. Alsina and J. Pascual and E. Morvan and P. Godignon and J. Mill{\'a}n",

year = "1999",

month = mar,

day = "1",

doi = "10.1016/S0925-9635(98)00275-1",

language = "English",

volume = "8",

pages = "357--360",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

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Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC. / Campos, F.J.; Mestres, N.; Alsina, F.; Pascual, J.; Morvan, E.; Godignon, P.; Millán, J.

In: Diamond and Related Materials, Vol. 8, No. 2-5, 01.03.1999, p. 357-360.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

AU - Campos, F.J.

AU - Mestres, N.

AU - Alsina, F.

AU - Pascual, J.

AU - Morvan, E.

AU - Godignon, P.

AU - Millán, J.

PY - 1999/3/1

Y1 - 1999/3/1

U2 - 10.1016/S0925-9635(98)00275-1

DO - 10.1016/S0925-9635(98)00275-1

M3 - Article

VL - 8

SP - 357

EP - 360

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

IS - 2-5

ER -