Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

F.J. Campos, N. Mestres, F. Alsina, J. Pascual, E. Morvan, P. Godignon, J. Millán

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)357-360
JournalDiamond and Related Materials
Issue number2-5
Publication statusPublished - 1 Mar 1999

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