Conductivity and charge trapping after electrical stress in amorphous and polycrystalline Al<inf>2</inf>O<inf>3</inf>Based Devices Studied With AFM-Related Techniques

Mario Lanza, Marc Porti, Montserrat Nafra, Xavier Aymerich, Gnther Benstetter, Edgar Lodermeier, Heiko Ranzinger, Gert Jaschke, Steffen Teichert, Lutz Wilde, Pawel Piotr Michalowski

Research output: Contribution to journalArticleResearchpeer-review

28 Citations (Scopus)

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Engineering & Materials Science