Compositional Characterization of a-SiC:H Films by Infra-red Spectroscopy

M.C. Polo, E. Pascual, J.L. Andújar, M. Ben el Mekki, J. Pascual, N. Mestres

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)365-368
JournalDiamond and Related Materials
Volume7
Issue number2-5
DOIs
Publication statusPublished - 1 Feb 1998

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