Original language | English |
---|---|
Pages (from-to) | 356-359 |
Journal | Journal of vacuum science & technology. B |
Volume | 27 |
Issue number | 1 |
Publication status | Published - 1 Jan 2009 |
Comparison of standard macroscopic and conductive atomic force microscopy leakage measurements on gate removed high-k capacitors
W. Polspoel, W. Vandervorst, L. Aguilera, M. Porti, M. Nafría, X. Aymerich
Research output: Contribution to journal › Article › Research
4
Citations
(Scopus)