Comparative Evaluation of Implantation Damage Produced by N and P Ions in 6H-SiC

J. Camassel, S. Blanque, N. Mestres, P. Godignon, J. Pascual

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-1
JournalPhys. Stat. Sol. (B)
Publication statusPublished - 1 Jan 2003

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