Original language | English |
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Pages (from-to) | 121-128 |
Journal | Probe microscopy |
Volume | 2 |
Issue number | 2 |
Publication status | Published - 1 Jan 2001 |
Combining laser and jumping mode AFM lithography on aluminum for the fabrication of nanoelectromechanical devices
G. Abadal, Z.J. Davis, A. Boisen, F. Pérez-Murano, N. Barniol, X. Borrisé
Research output: Contribution to journal › Article › Research
11
Citations
(Scopus)