Combining laser and jumping mode AFM lithography on aluminum for the fabrication of nanoelectromechanical devices

G. Abadal, Z.J. Davis, A. Boisen, F. Pérez-Murano, N. Barniol, X. Borrisé

Research output: Contribution to journal › Article › Research

Cite this

@article{b709ab6a645c4f5a824b91be107d64e2,

title = "Combining laser and jumping mode AFM lithography on aluminum for the fabrication of nanoelectromechanical devices",

author = "G. Abadal and Z.J. Davis and A. Boisen and F. P{\'e}rez-Murano and N. Barniol and X. Borris{\'e}",

year = "2001",

month = jan,

day = "1",

language = "English",

volume = "2",

pages = "121--128",

number = "2",

}