Combining laser and jumping mode AFM lithography on aluminum for the fabrication of nanoelectromechanical devices

G. Abadal, Z.J. Davis, A. Boisen, F. Pérez-Murano, N. Barniol, X. Borrisé

    Research output: Contribution to journalArticleResearch

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)121-128
    JournalProbe microscopy
    Volume2
    Issue number2
    Publication statusPublished - 1 Jan 2001

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