CMOS-MEMS resonators: From devices to applications

A. Uranga; J. Verd; N. Barniol

doi:10.1016/j.mee.2014.08.015

CMOS-MEMS resonators: From devices to applications

A. Uranga, J. Verd, N. Barniol

Department of Electronic Engineering

Research output: Contribution to journal › Review article › Research › peer-review

Abstract

© 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.

Original language	English
Pages (from-to)	58-73
Journal	Microelectronic Engineering
Volume	132
DOIs	https://doi.org/10.1016/j.mee.2014.08.015
Publication status	Published - 25 Jan 2015

Keywords

CMOS-MEMS
MEMS
Oscillators
Resonators
RF-MEMS

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abstract = "{\textcopyright} 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.",

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AU - Barniol, N.

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N2 - © 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.

AB - © 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.

KW - CMOS-MEMS

KW - MEMS

KW - Oscillators

KW - Resonators

KW - RF-MEMS

U2 - 10.1016/j.mee.2014.08.015

DO - 10.1016/j.mee.2014.08.015

M3 - Review article

VL - 132

SP - 58

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