CMOS integrated MEMS resonator for RF applications

A. Uranga, J. Teva, J. Lopez Verd, F. Torres, G. Abadal, N. Barniol, J. Esteve, F. Pérez-Murano

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationISCAS 2006 : IEEE International Symposium on Circuits and Systems: May 21-24, 2006, Island of Kos, Greece: Circuits and Systems, at Crossroadas of Life and Technology: Proceedings
Place of PublicationNova York (US)
Number of pages3
Publication statusPublished - 1 Jan 2006

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