CMOS integrated MEMS resonator for RF applications

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)2301-2304
JournalProc.- IEEE Int. Symp. Circuits Syst.
Volume1
Publication statusPublished - 1 Jan 2006

Cite this

Abadal Berini, G., Uranga Del Monte, M. A., Teva Meroño, J., Verd Martorell, J., & Torres Canals, F. (2006). CMOS integrated MEMS resonator for RF applications. Proc.- IEEE Int. Symp. Circuits Syst., 1, 2301-2304.