Characterization of the spatial distribution of traps in Si\sub 3\nosub N\sub 4\nosub by field assisted discharge of MNOS devices

F. Martín, X. Aymerich

Research output: Contribution to journalArticleResearch

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)147-153
JournalThin Solid Films
Volume0
Issue number221
Publication statusPublished - 1 Jan 1992

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