CHARACTERIZATION OF CMOS-MEMS RESONATOR BY PULSED MODE ELECTROSTATIC ACTUATION

J. L. Munoz-Gamarra, E. Marigo, J. Giner, A. Uranga, F. Torres, N. Barniol, IEEE

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Journal2010 Ieee International Frequency Control Symposium (Fcs)
DOIs
Publication statusPublished - 2010

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