Cellule de mesure nanocalorimétrique par méthode alternative en parylène autosuspendu

Emmanuel Andre; Aitor  Lopeandia; Jean Luc Garden; Dominique Givord; Olivier Bourgeois

doi:10.3166/I2M.11.3-4.89-106

Cellule de mesure nanocalorimétrique par méthode alternative en parylène autosuspendu

Translated title of the contribution: Parylene self-suspended measurement cell by nanocalorimetric alternative method

Emmanuel Andre^*, Aitor Lopeandia, Jean Luc Garden, Dominique Givord, Olivier Bourgeois

^*Corresponding author for this work

Pôle Capteurs Thermométriques et Calorimétrie

Research output: Contribution to journal › Article › Research › peer-review

Abstract

We report the microfabrication and operation of a highly sensitive ac-calorimeter designed to characterize small mass magnetic systems operating at very low frequencies (from 0.1 to 5 Hz) in a temperature range from 20 to 300 K. The calorimetric cell is built in the center of a 500 nm thick polymeric membrane of parylene held up by a Cu frame. With these characteristics the frequency of adiabaticity is typically around few hertz and energy exchanges as small as 1pJ can be detected. Measurements have been performed on Co/Au thin films and on the GdAl ₂ microcrystal where the ferromagnetic phase transition is clearly evidenced.

Translated title of the contribution	Parylene self-suspended measurement cell by nanocalorimetric alternative method
Original language	French
Pages (from-to)	89-106
Number of pages	18
Journal	Instrumentation Mesure Metrologie
Volume	11
Issue number	3-4
DOIs	https://doi.org/10.3166/I2M.11.3-4.89-106
Publication status	Published - 2011

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10.3166/I2M.11.3-4.89-106

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title = "Cellule de mesure nanocalorim{\'e}trique par m{\'e}thode alternative en paryl{\`e}ne autosuspendu",

abstract = "We report the microfabrication and operation of a highly sensitive ac-calorimeter designed to characterize small mass magnetic systems operating at very low frequencies (from 0.1 to 5 Hz) in a temperature range from 20 to 300 K. The calorimetric cell is built in the center of a 500 nm thick polymeric membrane of parylene held up by a Cu frame. With these characteristics the frequency of adiabaticity is typically around few hertz and energy exchanges as small as 1pJ can be detected. Measurements have been performed on Co/Au thin films and on the GdAl 2 microcrystal where the ferromagnetic phase transition is clearly evidenced.",

keywords = "AC calorimetry, GdAl, Microcalorimetry, Microfabrication, Nanocalorimetry, Parylen, Sensors",

author = "Emmanuel Andre and Aitor Lopeandia and Garden, {Jean Luc} and Dominique Givord and Olivier Bourgeois",

year = "2011",

doi = "10.3166/I2M.11.3-4.89-106",

language = "Franc{\'e}s",

volume = "11",

pages = "89--106",

journal = "Instrumentation Mesure Metrologie",

issn = "1631-4670",

publisher = "Hermes Science Publishing Ltd",

number = "3-4",

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TY - JOUR

T1 - Cellule de mesure nanocalorimétrique par méthode alternative en parylène autosuspendu

AU - Andre, Emmanuel

AU - Lopeandia, Aitor

AU - Garden, Jean Luc

AU - Givord, Dominique

AU - Bourgeois, Olivier

PY - 2011

Y1 - 2011

N2 - We report the microfabrication and operation of a highly sensitive ac-calorimeter designed to characterize small mass magnetic systems operating at very low frequencies (from 0.1 to 5 Hz) in a temperature range from 20 to 300 K. The calorimetric cell is built in the center of a 500 nm thick polymeric membrane of parylene held up by a Cu frame. With these characteristics the frequency of adiabaticity is typically around few hertz and energy exchanges as small as 1pJ can be detected. Measurements have been performed on Co/Au thin films and on the GdAl 2 microcrystal where the ferromagnetic phase transition is clearly evidenced.

AB - We report the microfabrication and operation of a highly sensitive ac-calorimeter designed to characterize small mass magnetic systems operating at very low frequencies (from 0.1 to 5 Hz) in a temperature range from 20 to 300 K. The calorimetric cell is built in the center of a 500 nm thick polymeric membrane of parylene held up by a Cu frame. With these characteristics the frequency of adiabaticity is typically around few hertz and energy exchanges as small as 1pJ can be detected. Measurements have been performed on Co/Au thin films and on the GdAl 2 microcrystal where the ferromagnetic phase transition is clearly evidenced.

KW - AC calorimetry

KW - GdAl

KW - Microcalorimetry

KW - Microfabrication

KW - Nanocalorimetry

KW - Parylen

KW - Sensors

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U2 - 10.3166/I2M.11.3-4.89-106

DO - 10.3166/I2M.11.3-4.89-106

M3 - Artículo

AN - SCOPUS:84860291657

VL - 11

SP - 89

EP - 106

JO - Instrumentation Mesure Metrologie

JF - Instrumentation Mesure Metrologie

SN - 1631-4670

IS - 3-4

ER -

Cellule de mesure nanocalorimétrique par méthode alternative en parylène autosuspendu

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