CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology": International Conference on Integrated Nano/Microtechnology for Space Applications

F. Gaiseanu, C. Postolache, D. Dascalu, J. Esteve, D. Tsoukalas, R. Jachowicz, A. Badoiu

    Research output: Book/ReportProceedingResearch

    Original languageEnglish
    Place of PublicationHouston (US)
    Number of pages4
    ISBN (Electronic)0780344324
    Publication statusPublished - Oct 1998

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