CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology": International Conference on Integrated Nano/Microtechnology for Space Applications

F. Gaiseanu; C. Postolache; D. Dascalu; J. Esteve; D. Tsoukalas; R. Jachowicz; A. Badoiu

CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology": International Conference on Integrated Nano/Microtechnology for Space Applications

F. Gaiseanu, C. Postolache, D. Dascalu, J. Esteve, D. Tsoukalas, R. Jachowicz, A. Badoiu

Research output: Book/Report › Proceeding › Research

Original language	English
Place of Publication	Houston (US)
Number of pages	4
ISBN (Electronic)	0780344324
Publication status	Published - Oct 1998

Cite this

Gaiseanu, F. ; Postolache, C. ; Dascalu, D. ; Esteve, J. ; Tsoukalas, D. ; Jachowicz, R. ; Badoiu, A. / CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology" : International Conference on Integrated Nano/Microtechnology for Space Applications. Houston (US), 1998. 4 p.

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title = "CAS'98 Proceedings, vol 1 : {"} Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology{"}: International Conference on Integrated Nano/Microtechnology for Space Applications",

author = "F. Gaiseanu and C. Postolache and D. Dascalu and J. Esteve and D. Tsoukalas and R. Jachowicz and A. Badoiu",

year = "1998",

month = oct,

language = "English",

isbn = "0-7803-4432-4",

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Gaiseanu, F, Postolache, C, Dascalu, D, Esteve, J, Tsoukalas, D, Jachowicz, R & Badoiu, A 1998, CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology": International Conference on Integrated Nano/Microtechnology for Space Applications. Houston (US).

CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology" : International Conference on Integrated Nano/Microtechnology for Space Applications. / Gaiseanu, F.; Postolache, C.; Dascalu, D.; Esteve, J.; Tsoukalas, D.; Jachowicz, R.; Badoiu, A.

Houston (US), 1998. 4 p.

Research output: Book/Report › Proceeding › Research

TY - BOOK

T1 - CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology"

T2 - International Conference on Integrated Nano/Microtechnology for Space Applications

AU - Gaiseanu, F.

AU - Postolache, C.

AU - Dascalu, D.

AU - Esteve, J.

AU - Tsoukalas, D.

AU - Jachowicz, R.

AU - Badoiu, A.

PY - 1998/10

Y1 - 1998/10

M3 - Proceeding

SN - 0-7803-4432-4

BT - CAS'98 Proceedings, vol 1 : " Stress control for process optimization of the capacitive pressure sensors for biomedical applicationsachieved by surface micromachining technology"

CY - Houston (US)

ER -