Cantilever based MEMS for multiple mass sensing

M. Villarroya, J. Verd, J. Teva, G. Abadal, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationPhd research in microelectronics and electronics, PRIME 2005
Place of PublicationLausanne (CH)
Number of pages3
Publication statusPublished - 1 Jan 2005

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