Cantilever based MEMS for multiple mass sensing

M. Villarroya, J. Verd, J. Teva, G. Abadal, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	Phd research in microelectronics and electronics, PRIME 2005
Place of Publication	Lausanne (CH)
Pages	171-174
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2005

Cite this

@inbook{8e705f9e8b184d39a72eabaa92dfe3d5,

title = "Cantilever based MEMS for multiple mass sensing",

author = "M. Villarroya and J. Verd and J. Teva and G. Abadal and F. P{\'e}rez-Murano and J. Esteve and N. Barniol",

year = "2005",

month = jan,

day = "1",

language = "English",

isbn = "978-0-7803-9345-5",

pages = "171--174",

booktitle = "Phd research in microelectronics and electronics, PRIME 2005",

edition = "1",

}