Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	599-602
Journal	Microelectronic Engineering
Volume	98
DOIs	https://doi.org/10.1016/j.mee.2012.05.062
Publication status	Published - 1 Jan 2012

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title = "Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator",

author = "{J. Giner}, {A. Uranga} and N. Barniol",

year = "2012",

month = jan,

day = "1",

doi = "10.1016/j.mee.2012.05.062",

language = "English",

volume = "98",

pages = "599--602",

journal = "Microelectronic Engineering",

issn = "0167-9317",

}

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T1 - Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator

AU - J. Giner, A. Uranga

AU - Barniol, N.

PY - 2012/1/1

Y1 - 2012/1/1

U2 - 10.1016/j.mee.2012.05.062

DO - 10.1016/j.mee.2012.05.062

M3 - Article

SN - 0167-9317

VL - 98

SP - 599

EP - 602

JO - Microelectronic Engineering

JF - Microelectronic Engineering

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