Calculation of channeling effects in ion implantation

Translated title of the contribution: Calculation of channeling effects in ion implantation

J. Bausells, J. Montserrat, G. Badenes, LORA TAMAYO E.

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7 Citations (Scopus)

Translated title of the contribution	Calculation of channeling effects in ion implantation
Original language	Multiple languages
Pages (from-to)	666-670
Journal	Nuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment
Volume	55
Publication status	Published - 1 Jan 1991

Cite this

@article{19a03075b6444076824064cdf61ecc0d,

title = "Calculation of channeling effects in ion implantation",

author = "J. Bausells and J. Montserrat and G. Badenes and E., \{LORA TAMAYO\}",

year = "1991",

month = jan,

day = "1",

language = "M{\'u}ltiples idiomas",

volume = "55",

pages = "666--670",

journal = "Nuclear instruments \& methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment",

issn = "0168-9002",

publisher = "Elsevier",

}

TY - JOUR

T1 - Calculation of channeling effects in ion implantation

AU - Bausells, J.

AU - Montserrat, J.

AU - Badenes, G.

AU - E., LORA TAMAYO

PY - 1991/1/1

Y1 - 1991/1/1

UR - https://www.scopus.com/pages/publications/44949275176

M3 - Artículo

SN - 0168-9002

VL - 55

SP - 666

EP - 670

JO - Nuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment

JF - Nuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment

ER -