Calculation of channeling effects in ion implantation

Translated title of the contribution: Calculation of channeling effects in ion implantation

J. Bausells, J. Montserrat, G. Badenes, LORA TAMAYO E.

Research output: Contribution to journalArticleResearch

5 Citations (Scopus)
Translated title of the contributionCalculation of channeling effects in ion implantation
Original languageMultiple languages
Pages (from-to)666-670
JournalNuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment
Volume55
Publication statusPublished - 1 Jan 1991

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