| Translated title of the contribution | Calculation of channeling effects in ion implantation |
|---|---|
| Original language | Multiple languages |
| Pages (from-to) | 666-670 |
| Journal | Nuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment |
| Volume | 55 |
| Publication status | Published - 1 Jan 1991 |
Calculation of channeling effects in ion implantation
J. Bausells, J. Montserrat, G. Badenes, LORA TAMAYO E.
Research output: Contribution to journal › Article › Research
5
Citations
(Scopus)