Translated title of the contribution | Calculation of channeling effects in ion implantation |
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Original language | Multiple languages |
Pages (from-to) | 666-670 |
Journal | Nuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment |
Volume | 55 |
Publication status | Published - 1 Jan 1991 |
Calculation of channeling effects in ion implantation
J. Bausells, J. Montserrat, G. Badenes, LORA TAMAYO E.
Research output: Contribution to journal › Article › Research
5
Citations
(Scopus)