Calculation of channeling effects in ion implantation

Translated title of the contribution: Calculation of channeling effects in ion implantation

J. Bausells, J. Montserrat, G. Badenes, LORA TAMAYO E.

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Translated title of the contribution	Calculation of channeling effects in ion implantation
Original language	Multiple languages
Pages (from-to)	666-670
Journal	Nuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment
Volume	55
Publication status	Published - 1 Jan 1991

Cite this

@article{19a03075b6444076824064cdf61ecc0d,

title = "Calculation of channeling effects in ion implantation",

author = "J. Bausells and J. Montserrat and G. Badenes and E., {LORA TAMAYO}",

year = "1991",

month = jan,

day = "1",

language = "M{\'u}ltiples idiomas",

volume = "55",

pages = "666--670",

journal = "Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

issn = "0168-9002",

}

TY - JOUR

T1 - Calculation of channeling effects in ion implantation

AU - Bausells, J.

AU - Montserrat, J.

AU - Badenes, G.

AU - E., LORA TAMAYO

PY - 1991/1/1

Y1 - 1991/1/1

M3 - Artículo

VL - 55

SP - 666

EP - 670

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

SN - 0168-9002

ER -