Breakdown Modes and Breakdown Statistics of Ultrathin SiO2 Gate Oxides

J. Suñé, D. Jiménez, E. Miranda, D J Dumin (Editor)

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationOXIDE RELIABILITY A Summary of Silicon Oxide Wearout, Breakdown, and Reliability
Place of PublicationAl Isma'iliyah (US)
Pages173-232
Number of pages59
Volume23
Edition1
Publication statusPublished - 1 Jan 2002

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