Breakdown Modes and Breakdown Statistics of Ultrathin SiO2 Gate Oxides

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	OXIDE RELIABILITY A Summary of Silicon Oxide Wearout, Breakdown, and Reliability
Place of Publication	Al Isma'iliyah (US)
Pages	173-232
Number of pages	59
Volume	23
Edition	1
Publication status	Published - 1 Jan 2002

Cite this

@inbook{f83b1da3477848cebf3268b716850bf7,

title = "Breakdown Modes and Breakdown Statistics of Ultrathin SiO2 Gate Oxides",

author = "J. Su{\~n}{\'e} and D. Jim{\'e}nez and E. Miranda and Dumin, {D J}",

year = "2002",

month = jan,

day = "1",

language = "English",

isbn = "978-981-02-4842-0",

volume = "23",

pages = "173--232",

booktitle = "OXIDE RELIABILITY A Summary of Silicon Oxide Wearout, Breakdown, and Reliability",

edition = "1",

}