Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Humberto Campanella*, Pascal Nouet, Arantxa Uranga, Pedro De Paco, Nuria Barniol, Jaume Esteve

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

2 Citations (Scopus)

Abstract

On-wafer parameter extraction in thin-film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least-squares optimization strategy, obtaining the equivalent-circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model-based de-embedding of the FBAR parameters.

Original languageEnglish
Pages (from-to)4-7
Number of pages4
JournalMicrowave and Optical Technology Letters
Volume50
Issue number1
DOIs
Publication statusPublished - Jan 2008

Keywords

  • Automatic fitting
  • Equivalent-circuit representation of devices
  • FBAR
  • Parameter extraction of MEMS resonators
  • Thin-film bulk acoustic wave resonators

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