Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Humberto Campanella; Pascal Nouet; Arantxa Uranga; Pedro De Paco; Nuria Barniol; Jaume Esteve

doi:10.1002/mop.22986

Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Humberto Campanella^*, Pascal Nouet, Arantxa Uranga, Pedro De Paco, Nuria Barniol, Jaume Esteve

^*Corresponding author for this work

Research output: Contribution to journal › Article › Research › peer-review

2 Citations (Scopus)

Abstract

On-wafer parameter extraction in thin-film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least-squares optimization strategy, obtaining the equivalent-circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model-based de-embedding of the FBAR parameters.

Original language	English
Pages (from-to)	4-7
Number of pages	4
Journal	Microwave and Optical Technology Letters
Volume	50
Issue number	1
DOIs	https://doi.org/10.1002/mop.22986
Publication status	Published - Jan 2008

Keywords

Automatic fitting
Equivalent-circuit representation of devices
FBAR
Parameter extraction of MEMS resonators
Thin-film bulk acoustic wave resonators

Access to Document

10.1002/mop.22986

Cite this

@article{d2661bceaafd4c688f5947d0c3b155d4,

title = "Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate",

abstract = "On-wafer parameter extraction in thin-film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least-squares optimization strategy, obtaining the equivalent-circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model-based de-embedding of the FBAR parameters.",

keywords = "Automatic fitting, Equivalent-circuit representation of devices, FBAR, Parameter extraction of MEMS resonators, Thin-film bulk acoustic wave resonators",

author = "Humberto Campanella and Pascal Nouet and Arantxa Uranga and {De Paco}, Pedro and Nuria Barniol and Jaume Esteve",

year = "2008",

month = jan,

doi = "10.1002/mop.22986",

language = "English",

volume = "50",

pages = "4--7",

journal = "Microwave and Optical Technology Letters",

issn = "0895-2477",

publisher = "John Wiley and Sons Inc.",

number = "1",

}

Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate. / Campanella, Humberto; Nouet, Pascal; Uranga, Arantxa ; De Paco, Pedro ; Barniol, Nuria; Esteve, Jaume.

In: Microwave and Optical Technology Letters, Vol. 50, No. 1, 01.2008, p. 4-7.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

AU - Campanella, Humberto

AU - Nouet, Pascal

AU - Uranga, Arantxa

AU - De Paco, Pedro

AU - Barniol, Nuria

AU - Esteve, Jaume

PY - 2008/1

Y1 - 2008/1

N2 - On-wafer parameter extraction in thin-film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least-squares optimization strategy, obtaining the equivalent-circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model-based de-embedding of the FBAR parameters.

AB - On-wafer parameter extraction in thin-film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least-squares optimization strategy, obtaining the equivalent-circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model-based de-embedding of the FBAR parameters.

KW - Automatic fitting

KW - Equivalent-circuit representation of devices

KW - FBAR

KW - Parameter extraction of MEMS resonators

KW - Thin-film bulk acoustic wave resonators

UR - http://www.scopus.com/inward/record.url?scp=38049184646&partnerID=8YFLogxK

U2 - 10.1002/mop.22986

DO - 10.1002/mop.22986

M3 - Article

AN - SCOPUS:38049184646

VL - 50

SP - 4

EP - 7

JO - Microwave and Optical Technology Letters

JF - Microwave and Optical Technology Letters

SN - 0895-2477

IS - 1

ER -

Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this