On-wafer parameter extraction in thin-film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least-squares optimization strategy, obtaining the equivalent-circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model-based de-embedding of the FBAR parameters.
- Automatic fitting
- Equivalent-circuit representation of devices
- Parameter extraction of MEMS resonators
- Thin-film bulk acoustic wave resonators