This paper reviews the work developed in a recent PhD Thesis in the field of optical deflectometry. Deflectometry is an optical technique used for surface characterization, based in the measurement of the shift of a laser beam after reflection on the surface sample. The angular deviation between the incident and reflected beams is directly related to the shape of the surface. In this way, the surface topography can be obtained by integrating the experimental data, which related to the surface derivative. In this paper we review and analyze different integration methods, one and bidimensional, for their application to the optical deflectometry technique. © Sociedad Española de Óptica.
|Journal||Optica Pura y Aplicada|
|Publication status||Published - 1 Jun 2009|
- Numerical integration
- Optical metrology