Application of numerical integration methods to surface characterization by optical deflectometry

Alfonso Moreno, Juan Campos

    Research output: Contribution to journalArticleResearchpeer-review

    Abstract

    This paper reviews the work developed in a recent PhD Thesis in the field of optical deflectometry. Deflectometry is an optical technique used for surface characterization, based in the measurement of the shift of a laser beam after reflection on the surface sample. The angular deviation between the incident and reflected beams is directly related to the shape of the surface. In this way, the surface topography can be obtained by integrating the experimental data, which related to the surface derivative. In this paper we review and analyze different integration methods, one and bidimensional, for their application to the optical deflectometry technique. © Sociedad Española de Óptica.
    Original languageEnglish
    Pages (from-to)115-124
    JournalOptica Pura y Aplicada
    Volume42
    Issue number2
    Publication statusPublished - 1 Jun 2009

    Keywords

    • Numerical integration
    • Optical metrology

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