Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)

Humberto Campanella; Emile Martincic; Pascal Nouet; Arantxa Uranga; Jaume Esteve

doi:https://doi.org/10.1109/JSEN.2009.2024858

Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)

Humberto Campanella, Emile Martincic, Pascal Nouet, Arantxa Uranga, Jaume Esteve

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research › peer-review

11 Citations (Scopus)

Abstract

Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. While our group demonstrated FBAR-based localized-mass sensors, no previous modeling of these sensors is found in the literature. The finite-element model (FEM) defines the boundary conditions and performs parametric analysis of the sensor's mass loading, whereas the analytical approach takes advantage on a modified Mason's model to describe the transmission-line circuit of the sensor. The sensitivity of the resonance frequency to location and size of mass deposition has been studied. Both the experimental and modeled responsivities exhibit a nonlinear dependence on the location and size of the localized-mass. © 2006 IEEE.

Original language	English
Article number	5153562
Pages (from-to)	892-901
Journal	IEEE Sensors Journal
Volume	9
DOIs	https://doi.org/10.1109/JSEN.2009.2024858
Publication status	Published - 1 Jan 2009

Keywords

Acoustic resonators
Bulk acoustic wave devices
Finite-element methods (FEM)
Modeling
Sensitivity
Transducers

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title = "Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)",

abstract = "Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. While our group demonstrated FBAR-based localized-mass sensors, no previous modeling of these sensors is found in the literature. The finite-element model (FEM) defines the boundary conditions and performs parametric analysis of the sensor's mass loading, whereas the analytical approach takes advantage on a modified Mason's model to describe the transmission-line circuit of the sensor. The sensitivity of the resonance frequency to location and size of mass deposition has been studied. Both the experimental and modeled responsivities exhibit a nonlinear dependence on the location and size of the localized-mass. {\textcopyright} 2006 IEEE.",

keywords = "Acoustic resonators, Bulk acoustic wave devices, Finite-element methods (FEM), Modeling, Sensitivity, Transducers",

author = "Humberto Campanella and Emile Martincic and Pascal Nouet and Arantxa Uranga and Jaume Esteve",

year = "2009",

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doi = "https://doi.org/10.1109/JSEN.2009.2024858",

language = "English",

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T1 - Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)

AU - Campanella, Humberto

AU - Martincic, Emile

AU - Nouet, Pascal

AU - Uranga, Arantxa

AU - Esteve, Jaume

PY - 2009/1/1

Y1 - 2009/1/1

N2 - Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. While our group demonstrated FBAR-based localized-mass sensors, no previous modeling of these sensors is found in the literature. The finite-element model (FEM) defines the boundary conditions and performs parametric analysis of the sensor's mass loading, whereas the analytical approach takes advantage on a modified Mason's model to describe the transmission-line circuit of the sensor. The sensitivity of the resonance frequency to location and size of mass deposition has been studied. Both the experimental and modeled responsivities exhibit a nonlinear dependence on the location and size of the localized-mass. © 2006 IEEE.

AB - Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. While our group demonstrated FBAR-based localized-mass sensors, no previous modeling of these sensors is found in the literature. The finite-element model (FEM) defines the boundary conditions and performs parametric analysis of the sensor's mass loading, whereas the analytical approach takes advantage on a modified Mason's model to describe the transmission-line circuit of the sensor. The sensitivity of the resonance frequency to location and size of mass deposition has been studied. Both the experimental and modeled responsivities exhibit a nonlinear dependence on the location and size of the localized-mass. © 2006 IEEE.

KW - Acoustic resonators

KW - Bulk acoustic wave devices

KW - Finite-element methods (FEM)

KW - Modeling

KW - Sensitivity

KW - Transducers

U2 - https://doi.org/10.1109/JSEN.2009.2024858

DO - https://doi.org/10.1109/JSEN.2009.2024858

M3 - Article

VL - 9

SP - 892

EP - 901

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

SN - 1530-437X

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