Abstract
Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. While our group demonstrated FBAR-based localized-mass sensors, no previous modeling of these sensors is found in the literature. The finite-element model (FEM) defines the boundary conditions and performs parametric analysis of the sensor's mass loading, whereas the analytical approach takes advantage on a modified Mason's model to describe the transmission-line circuit of the sensor. The sensitivity of the resonance frequency to location and size of mass deposition has been studied. Both the experimental and modeled responsivities exhibit a nonlinear dependence on the location and size of the localized-mass. © 2006 IEEE.
Original language | English |
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Article number | 5153562 |
Pages (from-to) | 892-901 |
Journal | IEEE Sensors Journal |
Volume | 9 |
DOIs | |
Publication status | Published - 1 Jan 2009 |
Keywords
- Acoustic resonators
- Bulk acoustic wave devices
- Finite-element methods (FEM)
- Modeling
- Sensitivity
- Transducers