Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)

Humberto Campanella, Emile Martincic, Pascal Nouet, Arantxa Uranga, Jaume Esteve

Research output: Contribution to journalArticleResearchpeer-review

11 Citations (Scopus)

Abstract

Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. While our group demonstrated FBAR-based localized-mass sensors, no previous modeling of these sensors is found in the literature. The finite-element model (FEM) defines the boundary conditions and performs parametric analysis of the sensor's mass loading, whereas the analytical approach takes advantage on a modified Mason's model to describe the transmission-line circuit of the sensor. The sensitivity of the resonance frequency to location and size of mass deposition has been studied. Both the experimental and modeled responsivities exhibit a nonlinear dependence on the location and size of the localized-mass. © 2006 IEEE.
Original languageEnglish
Article number5153562
Pages (from-to)892-901
JournalIEEE Sensors Journal
Volume9
DOIs
Publication statusPublished - 1 Jan 2009

Keywords

  • Acoustic resonators
  • Bulk acoustic wave devices
  • Finite-element methods (FEM)
  • Modeling
  • Sensitivity
  • Transducers

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