All-stencil transistor fabrication on 3D silicon substrates

L. G. Villanueva, O. Vazquez-Mena, C. Martin-Olmos, V. Savu, K. Sidler, J. Montserrat, P. Langlet, C. Hibert, P. Vettiger, J. Bausells, J. Brugger

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Physics & Astronomy