AFM oxidation of Ti for nanoscale IC applications

Daniel Hill, Sascha Sadewasser, Xavier Aymerich

    Research output: Chapter in BookChapterResearchpeer-review

    Abstract

    © 2003 IOP Publishing Ltd. Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO2. The focus o f this work is on the conductive AFM performed topographical and electrical characterization of these structures.
    Original languageEnglish
    Title of host publicationMicroscopy of Semiconducting Materials 2003
    Pages665-668
    Number of pages3
    DOIs
    Publication statusPublished - 1 Jan 2018

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  • Cite this

    Hill, D., Sadewasser, S., & Aymerich, X. (2018). AFM oxidation of Ti for nanoscale IC applications. In Microscopy of Semiconducting Materials 2003 (pp. 665-668) https://doi.org/10.1201/9781351074636