© 2003 IOP Publishing Ltd. Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO2. The focus o f this work is on the conductive AFM performed topographical and electrical characterization of these structures.
|Title of host publication||Microscopy of Semiconducting Materials 2003|
|Number of pages||3|
|Publication status||Published - 1 Jan 2018|