AFM lithography of aluminium for fabrication of nanomechanical systems

Z.J. Davis, G. Abadal, O. Hansen, X. Borrisé, N. Barniol, F. Pérez-Murano, A. Boisen

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	467-472
Journal	Ultramicroscopy: journal devoted to the technical and theoretical advancement of structural research
Volume	97
Publication status	Published - 1 Jan 2003

Cite this

@article{ae52f6698dad4e18b6c574c4f8e6b394,

title = "AFM lithography of aluminium for fabrication of nanomechanical systems",

author = "Z.J. Davis and G. Abadal and O. Hansen and X. Borris{\'e} and N. Barniol and F. P{\'e}rez-Murano and A. Boisen",

year = "2003",

month = jan,

day = "1",

language = "English",

volume = "97",

pages = "467--472",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier",

}