AFM lithography of aluminium for fabrication of nanomechanical systems

Z.J. Davis, G. Abadal, O. Hansen, X. Borrisé, N. Barniol, F. Pérez-Murano, A. Boisen

    Research output: Contribution to journalArticleResearch

    62 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)467-472
    JournalUltramicroscopy: journal devoted to the technical and theoretical advancement of structural research
    Publication statusPublished - 1 Jan 2003

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