AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection

María Villarroya, Francesc Pérez-Murano, Cristina Martín, Zachary Davis, Anja Boisen, Jaume Esteve, Eduard Figueras, Josep Montserrat, Núria Barniol

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19 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science