AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection

María Villarroya; Francesc Pérez-Murano; Cristina Martín; Zachary Davis; Anja Boisen; Jaume Esteve; Eduard Figueras; Josep Montserrat; Núria Barniol

doi:https://doi.org/10.1088/0957-4484/15/7/009

AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection

María Villarroya, Francesc Pérez-Murano, Cristina Martín, Zachary Davis, Anja Boisen, Jaume Esteve, Eduard Figueras, Josep Montserrat, Núria Barniol

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research › peer-review

20 Citations (Scopus)

Abstract

The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography.

Original language	English
Pages (from-to)	771-776
Journal	Nanotechnology
Volume	15
DOIs	https://doi.org/10.1088/0957-4484/15/7/009
Publication status	Published - 1 Jul 2004

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title = "AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection",

abstract = "The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography.",

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T1 - AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection

AU - Villarroya, María

AU - Pérez-Murano, Francesc

AU - Martín, Cristina

AU - Davis, Zachary

AU - Boisen, Anja

AU - Esteve, Jaume

AU - Figueras, Eduard

AU - Montserrat, Josep

AU - Barniol, Núria

PY - 2004/7/1

Y1 - 2004/7/1

N2 - The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography.

AB - The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography.

U2 - https://doi.org/10.1088/0957-4484/15/7/009

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VL - 15

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EP - 776

JO - Nanotechnology

JF - Nanotechnology

ER -

AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection

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