AES study of the SiO\sub 2\nosub /SiC interface in the oxidation of CVD \beta-SiC

R. Berjoan, J. Rodriguez, F. Sibieude

Research output: Contribution to journalArticleResearch

28 Citations (Scopus)
Original languageEnglish
Pages (from-to)237-243
JournalSurface Science
Volume271
Issue number1-2
DOIs
Publication statusPublished - 1 Feb 1992

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