In this article, recent patents on bulk acoustic wave (BAW) resonators and filters are reviewed. This technology is suggested as a viable alternative to conventional surface acoustic wave (SAW) technology since it offers better performance. As regards resonators, in this review article recent patents on the design and fabrication of Film Bulk Acoustic Resonators (FBARs) and Solidly Mounted Resonators (SMRs) are presented. The reviewed patents on BAW filters are divided into two categories. In the first one, patents which deal with electrically-connected resonator filters are presented, whereas in the second one, acoustically-coupled resonator filters are addressed. Finally, current and future developments of this technology are given. © 2009 Bentham Science Publishers Ltd.
- Acoustically-coupled resonator filters
- Bulk acoustic wave technology
- Electrically-connected resonator filters