A platform for monolithic CMOS-MEMS integration on SOI wafers

María Villarroya, Eduard Figueras, Josep Montserrat, Jaume Verd, Jordi Teva, Gabriel Abadal, Francesc Pérez Murano, Jaume Esteve, Núria Barniol

Research output: Contribution to journalArticleResearch

18 Citations (Scopus)

Abstract

A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. © 2006 IOP Publishing Ltd.
Original languageEnglish
Article number038
Pages (from-to)2203-2210
JournalJournal of Micromechanics and Microengineering
Volume16
Issue number10
DOIs
Publication statusPublished - 1 Oct 2006

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