A platform for monolithic CMOS-MEMS integration on SOI wafers

María Villarroya; Eduard Figueras; Josep Montserrat; Jaume Verd; Jordi Teva; Gabriel Abadal; Francesc Pérez Murano; Jaume Esteve; Núria Barniol

doi:10.1088/0960-1317/16/10/038

A platform for monolithic CMOS-MEMS integration on SOI wafers

María Villarroya, Eduard Figueras, Josep Montserrat, Jaume Verd, Jordi Teva, Gabriel Abadal, Francesc Pérez Murano, Jaume Esteve, Núria Barniol

Department of Electronic Engineering

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20 Citations (Scopus)

Abstract

A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. © 2006 IOP Publishing Ltd.

Original language	English
Article number	038
Pages (from-to)	2203-2210
Journal	Journal of Micromechanics and Microengineering
Volume	16
Issue number	10
DOIs	https://doi.org/10.1088/0960-1317/16/10/038
Publication status	Published - 1 Oct 2006

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@article{c4d68331a9744936a089a10d094c28e1,

title = "A platform for monolithic CMOS-MEMS integration on SOI wafers",

abstract = "A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. {\textcopyright} 2006 IOP Publishing Ltd.",

author = "Mar{\'i}a Villarroya and Eduard Figueras and Josep Montserrat and Jaume Verd and Jordi Teva and Gabriel Abadal and Murano, {Francesc P{\'e}rez} and Jaume Esteve and N{\'u}ria Barniol",

year = "2006",

month = oct,

day = "1",

doi = "10.1088/0960-1317/16/10/038",

language = "English",

volume = "16",

pages = "2203--2210",

number = "10",

}

TY - JOUR

T1 - A platform for monolithic CMOS-MEMS integration on SOI wafers

AU - Villarroya, María

AU - Figueras, Eduard

AU - Montserrat, Josep

AU - Verd, Jaume

AU - Teva, Jordi

AU - Abadal, Gabriel

AU - Murano, Francesc Pérez

AU - Esteve, Jaume

AU - Barniol, Núria

PY - 2006/10/1

Y1 - 2006/10/1

N2 - A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. © 2006 IOP Publishing Ltd.

AB - A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. © 2006 IOP Publishing Ltd.

U2 - 10.1088/0960-1317/16/10/038

DO - 10.1088/0960-1317/16/10/038

M3 - Article

VL - 16

SP - 2203

EP - 2210

IS - 10

M1 - 038

ER -

A platform for monolithic CMOS-MEMS integration on SOI wafers

Abstract

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