| Original language | English |
|---|---|
| Pages (from-to) | 1150122- |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 26 |
| Publication status | Published - 1 Jan 2016 |
A Monollithically Integrated Torsional CMOS-MEMS Relay
M. Riverola, G. Sobreviela, F. Torres, A. Uranga, N. Barniol
Research output: Contribution to journal › Article › Research