Preliminary studies to obtain an integrated solid state gas microsensor are presented in this work. FEM thermal simulations have been carried out to optimize the membrane and heater layouts with the aim of increasing temperature uniformity on the sensitive area and decreasing power consumption. Heater materials and full process flow have been defined in order to achieve compatibility with a CMOS technology with minor changes. On the other hand, first tests of sensitivity with pure tin oxide and Pt-doped tin oxide deposited by a sputtering process on alumina substrates, for benzene and toluene, have given good results for low concentrations (100 ppm) at 400 and 300̊C respectively. © 1997 Elsevier Science S.A.
- FEM thermal simulations