A low-power-consumption out-of-plane electrothermal actuator

David Girbau, Marco Antonio Llamas, Jasmina Casals-Terré, Xavier Simó-Selvas, Lluís Pradell, Antonio Lázaro

Research output: Contribution to journalArticleResearchpeer-review

11 Citations (Scopus)


This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically. © 2007 IEEE.
Original languageEnglish
Pages (from-to)719-727
JournalJournal of Microelectromechanical Systems
Issue number3
Publication statusPublished - 1 Jun 2007


  • Buckle-beam actuator
  • Out-of-plane (vertical) and in-plane electrothermal actuators


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