A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction

J. Teva, G. Abadal, F. Torres, J. Verd, F. Pérez-Murano, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

22 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction'. Together they form a unique fingerprint.

Engineering